• 专利标题:   Graphene-based nanogap field emission transistor, has metal anode and metal cathode that are distributed at ends of control grid, and graphene film and silicon dioxide layer are arranged in sequence between metal cathode and control grid.
  • 专利号:   CN112670347-A, CN112670347-B
  • 发明人:   XU K, TIAN X, DUAN X, XU J, FU L, WANG H, CHEN L, DU Y, ZENG F
  • 专利权人:   UNIV ZHENGZHOU AERONAUTICS, UNIV ZHENGZHOU AERONAUTICS
  • 国际专利分类:   H01L021/336, H01L029/16, H01L029/417, H01L029/78
  • 专利详细信息:   CN112670347-A 16 Apr 2021 H01L-029/78 202146 Pages: 6 Chinese
  • 申请详细信息:   CN112670347-A CN10034237 12 Jan 2021
  • 优先权号:   CN10034237

▎ 摘  要

NOVELTY - The transistor has a substrate (1), a control grid (2), a metal anode (3) and a metal cathode (4) is arranged sequentially from bottom to top. The metal anode and metal cathode are distributed at both ends of the control grid. A nano-gap runs through a regulating gate. A graphene film and a silicon dioxide layer are arranged in sequence between the metal cathode and the control grid. The turn-on and turn-off between the metal anode and the metal cathode is realized by adjusting the voltage of the control grid. The substrate is a silicon (SI) substrate, and SI dioxide is grown on the Si substrate. The material of the control grid is provided with copper, aluminum, polysilicon and indium tin oxide (ITO). The thickness of the regulating grid is 30-50 nm. The thickness of the metal anode is 60-100 nm. USE - Graphene-based nanogap field emission transistor. ADVANTAGE - The transistor provides high frequency characteristic, and realizes source or drain distance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing graphene-based nanogap field emission transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene-based nanogap field emission transistor. Substrate (1) Control grid (2) Metal anode (3) Metal cathode (4) Nanometer gap (5)