• 专利标题:   Preparing graphene film, comprises moving growth substrate in reaction chamber at predetermined speed under action of conveying mechanism along with supporting structure until reaction chamber is conveyed out.
  • 专利号:   CN115074694-A, CN115074694-B
  • 发明人:   GUO B, QU Y, TAN H, SHEN D, WANG W
  • 专利权人:   JIANGSU JIANGNAN XIYUAN GRAPHENE TECHNOL, CHANGZHOU SIXTH ELEMENT SEMICONDUCTOR CO
  • 国际专利分类:   C01B032/186, C23C016/26, C23C016/458
  • 专利详细信息:   CN115074694-A 20 Sep 2022 C23C-016/26 202202 Chinese
  • 申请详细信息:   CN115074694-A CN10768556 01 Jul 2022
  • 优先权号:   CN10768556

▎ 摘  要

NOVELTY - Method for preparing graphene film involves (a) placing a growth substrate on a support structure and continuously conveying to a reaction cavity of chemical vapor deposition reaction under the action of a transmission mechanism with the support structure, (b) growing the graphene film on the growth substrate in the reaction cavity, and (c) moving the growth substrates in reaction cavity at a predetermined speed under the effect of the conveying mechanism along with the supporting structure until the reaction chamber is conveyed out. USE - Method for preparing graphene film. ADVANTAGE - The method enables preparing graphene film by chemical vapor deposition (CVD) method, thus realizing continuous preparation of graphene film without reducing the growth temperature and preparing high quality graphene film. The porous carbon film has excellent chemical stability and mechanical property, thus making the metal substrate of the graphene film grow without bearing tensile force at high temperature to be transmitted, avoiding the deformation of the substrate, and hence avoiding the breaking of the film caused by stretching and breaking. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view showing the flow direction of the porous carbon material supporting the growth substrate.