▎ 摘　　要

NOVELTY - Based on MEMS pressure sensor of graphene, belonging to micro-electromechanical system (MEMS) of pressure, solving the MEMS pressure sensor size is large, sensitivity, of. This utility new type comprise substrate, insulation layer, a substrate surface forming oxide insulation layer, inner insulation layer etching cavity, a surface insulation layer cover the graphene thin film, the said cavity is sealed, the graphene thin film is 1 to 5 layer of a graphene thin film edge two depositing a metal electrode, a a two metal electrode is welded with a lead. This utility new type using graphene thin film composed of the MEMS piezoresistive pressure sensor, preparation method is simple, the reliability is good, the pressure sensor has smaller size from the micron scale to nano-scale, has high sensitivity, the graphene layer number is 1 to 5 inner layer, which can increase a corresponding pressure of the application range is wider.