▎ 摘 要
NOVELTY - Scale-up of chemical vapor deposition growth of large area graphene involves forming a uniform solid carbon source layer (c1) on surface of growth substrate (s1), depositing a growth substrate (a2) and a solid phase carbon source layer (c2) on the surface of layer (c1), repeating to obtain required number of layers of growth substrate, growing the laminate of the growth substrate and the solid carbon source in a chemical vapor deposition system to form graphene on the surface of the growth substrate, and separating the growth substrate with graphene from the solid carbon source. USE - Scale-up of chemical vapor deposition growth of large area graphene (claimed). ADVANTAGE - The method enables economical and efficient scale-up of chemical vapor deposition growth of high-quality large area graphene with high yield of graphene growth, using reusable solid carbon source with reduced consumption of the high-purity gaseous carbon source. DETAILED DESCRIPTION - Scale-up of chemical vapor deposition growth of large area graphene involves forming a uniform solid carbon source layer (c1) on surface of planar structure of growth substrate (s1), depositing a growth substrate (a2) and a solid phase carbon source layer (c2) on the surface of layer (c1), repeating the process to obtain required number of layers of growth substrate, growing the laminate of the growth substrate and the solid carbon source in a chemical vapor deposition system to form graphene on the surface of the growth substrate, separating the growth substrate with graphene from the solid carbon source after chemical vapor deposition process and recycling the solid carbon source for growth process. Thus, the scale-up of chemical vapor deposition growth of large area graphene is carried out by alternately stacking growth substrate with solid phase carbon source, carrying out chemical vapor deposition growing process using planar structure of the growth substrate and recyclable solid phase carbon source, and forming a large area of graphene on upper and lower surfaces of the growth substrate with repeated use of solid carbon source.