• 专利标题:   Photodetector useful for e.g. deep ultraviolet and X-ray detection, comprises photosensitive layer of gallium oxide bulk junction material located on substrate, and counter electrode oppositely arranged on upper surface of gallium oxide bulk junction material photosensitive layer.
  • 专利号:   CN113437165-A, CN113437165-B
  • 发明人:   XU G, LONG S, YU S, DING M, ZHAO X
  • 专利权人:   UNIV CHINA SCI TECHNOLOGY
  • 国际专利分类:   H01L021/02, H01L031/18, H01L031/109, H01L031/032
  • 专利详细信息:   CN113437165-A 24 Sep 2021 H01L-031/032 202191 Chinese
  • 申请详细信息:   CN113437165-A CN10707371 24 Jun 2021
  • 优先权号:   CN10707371

▎ 摘  要

NOVELTY - Photodetector comprises a photosensitive layer of gallium oxide bulk junction material is located on a substrate. The photosensitive layer of gallium oxide bulk junction material includes semiconductor material which forms a type II heterojunction with gallium oxide and gallium oxide mixed based on a preset ratio. The counter electrode is oppositely arranged on upper surface of gallium oxide bulk junction material photosensitive layer or upper and lower surfaces of gallium oxide bulk junction material photosensitive layer. The semiconductor material forming type II heterojunction with gallium oxide is zinc oxide, nickel oxide, aluminum nitride, cadmium sulfide, selenium sulfide, gallium nitride, copper oxide, molybdenum disulfide, or ferroferric oxide. USE - The photodetector is useful for deep ultraviolet and X-ray detection, and in national soil safety radiation diffusion, space communication, medical health, aerospace and astronomical observation and military and civilian application fields. ADVANTAGE - The method: is simple, easy, and economical; and realizes large-area growth uniform film; and also reduces crystal lattice mismatch of traditional thin film type hetero-junction, and band-matching material. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing photodetector.