• 专利标题:   Semiconductor device has protective layer that covers the pad metal, and interlayer insulating film that contains graphene particles.
  • 专利号:   JP2017108047-A
  • 发明人:   MATSUBARA Y
  • 专利权人:   RENESAS ELECTRONICS CORP
  • 国际专利分类:   H01L021/316, H01L021/768, H01L023/532
  • 专利详细信息:   JP2017108047-A 15 Jun 2017 H01L-021/316 201742 Pages: 26 Japanese
  • 申请详细信息:   JP2017108047-A JP242024 11 Dec 2015
  • 优先权号:   JP242024

▎ 摘  要

NOVELTY - The semiconductor device has first wiring (M5) formed above semiconductor substrate (S). A second wiring (M6) is formed through an interlayer insulating film (IL6) on first wiring. The pad metal (PDM) is formed through an interlayer insulating film (IL7) on second wiring. A protective layer covers the pad metal. The interlayer insulating film contains graphene particles (GR). USE - Semiconductor device. ADVANTAGE - The heat dissipation of semiconductor device is improved. The performance of semiconductor device is increased. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of semiconductor device. (Drawing includes non-English language text) Graphene particles (GR) Interlayer insulating films (IL6,IL7) Wirings (M5,M6) Pad metal (PDM) Semiconductor substrate (S)