• 专利标题:   Optical phase modulator of beam scanner, has graphene film that is configured to cover portion of strip-shaped optical waveguide structure, and first metal electrode and second metal electrode that are configured in contact with film.
  • 专利号:   CN208283680-U
  • 发明人:   WANG Y, QIN L, SHAN X, SONG J, WANG L
  • 专利权人:   WANG L, XIAO D
  • 国际专利分类:   G02F001/01
  • 专利详细信息:   CN208283680-U 25 Dec 2018 G02F-001/01 201912 Pages: 9 Chinese
  • 申请详细信息:   CN208283680-U CN20815624 28 May 2018
  • 优先权号:   CN20815624

▎ 摘  要

NOVELTY - The utility model claims an optical phase modulator and a light beam scanner, the optical phase modulator comprises a substrate, strip-shaped optical waveguide structure according to the first direction on the substrate, covering the upper part of the strip-shaped optical waveguide structure of the graphene film; first metal electrode set on one side of the strip-shaped optical waveguide structure in a second direction, and set at the other side of the strip-shaped optical waveguide structure of the second metal electrode and the first metal electrode and the second metal electrode are contacted and connected with the graphene film; wherein the first direction and the second direction are parallel to the substrate, and the first direction is vertical to said second direction. The optical phase modulator using a graphene film as heating material, under the premise of realizing the phase modulation, the working speed of the heating efficiency is improved and the device greatly.