▎ 摘　　要

NOVELTY - The accelerometer has a substrate (1) formed with a rectangular groove. An upper surface of the substrate is provided with a sensitive mass plate (2). An outer side of the substrate is provided with a groove frame. An upper surface of the sensitive mass plate is provided with a first insulating layer (4), a second insulating layer (7), a third insulating layer (10) and a four insulating layer (13). A vacuum cover is fixed on the substrate. An inner side of the sensitive mass plate is matched with the groove frame to finish sealing of an accelerometer body. USE - Resonance graphene biaxial accelerometer. ADVANTAGE - The accelerometer realizes measurement of acceleration by using composite sensitive acceleration mode. The accelerometer can realize coupling influence acting on different axial acceleration measurement by using the sensitive mass plate with different mass blocks, and improves acceleration measuring precision and reliability and realizes measurement of dual ultra-high sensitivity acceleration. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a resonance graphene biaxial accelerometer. Substrate (1) Sensitive mass plate (2) Graphene resonant beams (3, 6) Insulating layers (4, 7,710,13) Exciting electrode pairs (5, 8, 11, 14)