• 专利标题:   Preparation of graphite thermally conductive sheet used in e.g. semiconductor radiating device, involves array punching graphite sheet to form graphite sheet with array holes, plasma treating, grafting sheet with vinyl-containing silane coupling agent and depositing polymer layer on graphite sheet.
  • 专利号:   CN114334860-A
  • 发明人:   XU D, LIAO X, JI Y, WANG H, REN Z, WU P
  • 专利权人:   GUANGDONG SUQUN IND CO LTD
  • 国际专利分类:   C01B032/21, H01L023/367, H01L023/373
  • 专利详细信息:   CN114334860-A 12 Apr 2022 H01L-023/367 202281 Chinese
  • 申请详细信息:   CN114334860-A CN11628718 28 Dec 2021
  • 优先权号:   CN11628718

▎ 摘  要

NOVELTY - Preparation of graphite thermally conductive sheet involves performing array punching on a graphite sheet to obtain a graphite sheet with array holes, subjecting to plasma treatment, performing chemical grafting on the graphite sheet with a vinyl-containing silane coupling agent to obtain graphite sheet surface coated with a coupling agent layer, and depositing the outer surface of the graphite sheet having the coupling agent layer with a polymer layer by chemical vapor deposition. USE - Preparation of graphite thermally conductive sheet used in semiconductor radiating device (all claimed) and electronic product such as mobile phone, notebook computer, medical device and LED screen. ADVANTAGE - The prepared graphite thermally conductive sheet has improved radiating effect, uniform heat and excellent structural stability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for semiconductor radiating device, which comprises a packaged semiconductor chip, a radiator and the graphite thermally conductive sheet sandwiched between the packaged semiconductor chip and the radiator.