• 专利标题:   Laminate used for field effect transistor, has mica, self-assembled film formed on mica, and graphene film formed on self-assembled film in which each of molecules has hydrophobic principal chain.
  • 专利号:   WO2014171320-A1, US2016005881-A1, JP6004092-B2, JP2015512436-X
  • 发明人:   FUJII TAKESHI, SATO MARIKO, FUJII T, SATO M
  • 专利权人:   FUJI ELECTRIC CO LTD, FUJI ELECTRIC CO LTD
  • 国际专利分类:   B32B009/00, C01B031/02, C01B033/42, H01L021/02, H01L021/205, H01L021/208, H01L021/28, H01L021/336, H01L027/12, H01L029/06, H01L029/786, H01L051/05, H01L051/30, H01L051/40, H01L029/16
  • 专利详细信息:   WO2014171320-A1 23 Oct 2014 H01L-021/336 201471 Pages: 39 Japanese
  • 申请详细信息:   WO2014171320-A1 WOJP059489 31 Mar 2014
  • 优先权号:   JP087575

▎ 摘  要

NOVELTY - A laminate (100) has mica (102), a self-assembled film (104) formed on mica, and a graphene film (106) formed on self-assembled film. Each of molecules (104c) constituting the self-assembled film (104) has a hydrophobic principal chain (104b). USE - Laminate is used for field effect transistor (claimed). ADVANTAGE - The laminate has graphene film having high mobility, and provides high-speed field effect transistor. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) field effect transistor, which has the laminate, a drain electrode and a source electrode which are connected to the graphene film, a gate insulating film facing mica, and a gate electrode facing the graphene film; and (2) manufacture of laminate, which involves forming film (104) on mica, and forming film (106) on film (104). DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of laminate. Laminate (100) Mica (102) Surface facing the graphene film (102a) Self-assembled film (104) Principal chain (104b) Molecules (104c) Graphene film (106)