• 专利标题:   Preparing acoustic surface wave filter comprises transferring pattern to piezoelectric material and depositing a metal film on pattern, coating graphene aqueous dispersion on metal film, drying, forming a graphene electrode layer on metal film and removing photoresist.
  • 专利号:   CN116208107-A
  • 发明人:   YANG S
  • 专利权人:   BEIJING ZHONGKE FEIHONG TECHNOLOGY CO LT
  • 国际专利分类:   H01B013/00, H01B005/14, H03H003/08, H03H009/145
  • 专利详细信息:   CN116208107-A 02 Jun 2023 H03H-003/08 202355 Chinese
  • 申请详细信息:   CN116208107-A CN10229711 10 Mar 2023
  • 优先权号:   CN10229711

▎ 摘  要

NOVELTY - Preparing acoustic surface wave filter comprises (i) transferring the pattern to the piezoelectric material and depositing a metal film on the pattern; (ii) coating the graphene aqueous dispersion on the metal film, drying and forming a graphene electrode layer on the metal film; and (iii) removing the photoresist. The thickness of the metal film is 0.5-3 nm. The thickness of graphene electrode layer is 50-3μm. The metal film comprises copper film and/or titanium film. The piezoelectric material is lithium niobate, lithium tantalate or quartz. USE - The method is useful for preparing acoustic surface wave filter. ADVANTAGE - The method is simple and easy to operate. The filter has high power tolerance and operating frequency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for communication device.