• 专利标题:   Processing method for growing metal-doped graphene, involves performing plasma enhanced chemical vapor deposition process with carbon precursor, metal precursor, and predetermined element precursor to form metal-doped graphene.
  • 专利号:   US2017263940-A1, CN107176601-A, TW201732071-A, US10079392-B2, TW648423-B1, CN107176601-B
  • 发明人:   HUANG K, CHI Y, JI Y
  • 专利权人:   IND TECHNOLOGY RES INST, IND TECHNOLOGY RES INST, IND TECHNOLOGY RES INST, IND TECHNOLOGY RES INST
  • 国际专利分类:   C23C016/511, H01G011/36, H01G011/86, H01M004/86, H01M004/88, H01M004/90, H01M004/92, C01B032/186, C23C016/12, C23C016/14, C23C016/26, C10B031/04, C23C016/455, C23C016/50, H01B001/04, H01G011/32, H01M004/96, H01M004/80
  • 专利详细信息:   US2017263940-A1 14 Sep 2017 H01M-004/86 201764 Pages: 12 English
  • 申请详细信息:   US2017263940-A1 US202582 06 Jul 2016
  • 优先权号:   TW106978

▎ 摘  要

NOVELTY - The processing method involves preparing a carbon precursor (100), a metal precursor (102), and a group VI precursor (104). The carbon precursor includes hydrocarbon gas. The metal precursor includes aluminum chloride, ferric chloride or palladium dichloride. The group VI precursor includes sulfur, oxygen or selenium. A plasma enhanced chemical vapor deposition (PECVD) process is performed with the carbon precursor, the metal precursor, and the group VI precursor to form a metal-doped graphene (108). USE - Processing method for growing metal-doped graphene (claimed). ADVANTAGE - The processing method provides growing graphene and doping heteroatom at the same time. The method of growing metal-doped graphene implements rapid process, no extra heating needed and low flame temperature. The produced metal-doped graphene is suitably applied to capacitors, catalysts or hydrogen storage materials. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a metal-doped graphene that includes a graphene and a metal element. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic diagram of the method for growing a metal-doped graphene. Carbon precursor (100) Metal precursor (102) Group VI precursor (104) Graphene (106) Metal-doped graphene (108)