▎ 摘　　要

NOVELTY - The nanoribbon sensor comprises: a substrate (110); a graphene layer (130) formed on the substrate in a first direction; and an upper dielectric layer (140) formed on the graphene layer. The graphene layer has electrode regions respectively separated in the first direction, and a channel region (104) provided between the electrode regions. The channel region has a smaller line width than the electrode regions. The graphene layer of the channel region has an edge exposed from the upper dielectric layer and a line width of less than or equal to 100 nm, and comprises a single layer of carbon atoms. USE - The graphene nanoribbon sensor is useful for sensing molecules within a gas and bio materials by measuring surface defects and a decrease in conductivity resulted from a change of hybrid atomic orbitals (sp2)-bonded structure into hybrid atomic orbitals (sp3)-bonded structure due to the bonding between molecules to be measured. ADVANTAGE - The graphene nanoribbon sensor has high sensitivity using only an edge level change of a graphene layer. DETAILED DESCRIPTION - The nanoribbon sensor comprises: a substrate (110); a graphene layer (130) formed on the substrate in a first direction; and an upper dielectric layer (140) formed on the graphene layer. The graphene layer has electrode regions respectively separated in the first direction, and a channel region (104) provided between the electrode regions. The channel region has a smaller line width than the electrode regions. The graphene layer of the channel region has an edge exposed from the upper dielectric layer and a line width of less than or equal to 100 nm, and comprises a single layer of carbon atoms. The nanoribbon sensor further comprises a lower dielectric layer (120) provided between the substrate and the graphene layer. The lower dielectric layer, the graphene layer and the upper dielectric layer having the same line width have a ribbon shape in the first direction. DESCRIPTION OF DRAWING(S) - The figure shows a schematic perspective view of a graphene nanoribbon sensor. Channel region (104) Substrate (110) Lower dielectric layer (120) Graphene layer (130) Upper dielectric layer. (140)