• 专利标题:   Preparation of graphene for fabricating e.g. optical device, involves forming preset carbon atom-containing graphene layer on surface of polycrystalline cobalt thin-film, by radio frequency-plasma enhanced chemical vapor deposition.
  • 专利号:   CN105585011-A
  • 发明人:   LI P
  • 专利权人:   PINGDU HUADONG GRAPHITE PROCESS FACTORY
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN105585011-A 18 May 2016 C01B-031/04 201657 Pages: 4 Chinese
  • 申请详细信息:   CN105585011-A CN10660762 18 Nov 2014
  • 优先权号:   CN10660762

▎ 摘  要

NOVELTY - Preparation of graphene involves forming 1-5C graphene layer on surface of a polycrystalline cobalt thin-film formed using a magnetron sputtering sputter coating system as substrate, by radio frequency-plasma enhanced chemical vapor deposition at less than 800 degrees C and less than 78 sccm for 40 seconds. USE - Preparation of graphene used for fabricating electronic device and optical device. ADVANTAGE - The method enables economical preparation of graphene having high quality, specific surface area and excellent transparency, flexibility and electroconductivity, within short period of time.