▎ 摘 要
NOVELTY - The apparatus (1000) has a a sputter unit (1100) formed by depositing a titanium layer on one surface of a substrate. A carbon particle supply unit (1200) is provided with a pyrolyzer for generating carbon particles by thermally decomposing a raw material gas containing methane. A classifier sorts the carbon particles generated in the pyrolyzer by size. An injector (1300) is configured to grow the graphene layer by spraying the carbon particles selected by the classifier onto the titanium layer. USE - Large-area graphene continuous deposition apparatus. ADVANTAGE - The apparatus forms the large-area graphene layer to form carbon particles of a uniform size so as to select the carbon particles generated by thermal decomposition into uniform size using electrostatic force, so that physical properties in large-area graphene can be kept evenly high. DESCRIPTION OF DRAWING(S) - The drawing shows a side sectional view of a large-area graphene continuous deposition apparatus. Graphene continuous deposition device (1000) Sputter unit (1100) Carbon particle supply unit (1200) Injector (1300)