▎ 摘　　要

NOVELTY - Production of graphene involves (a) supplying a carbon-containing gas into a chamber, in which a metal catalyst is provided to grow graphene on a surface of the metal catalyst, (b) supplying a process gas containing oxygen gas or hydrogen gas into the chamber, in which the metal catalyst having the graphene grown on the surface of it, is provided to reactivate the metal catalyst, and (c) supplying the carbon-containing gas into the chamber, in which the reactivated metal catalyst is provided to regrow the graphene on the surface of the metal catalyst. USE - Production of graphene used as fine wiring material used for three-dimensional structure memory applications. ADVANTAGE - The method efficiently produces graphene with large grain size and high quality. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a configuration of a graphene producing system. Graphene producing system (10) Pressure transfer module (11) Processing module (13) Carrier (20) Process controller (23)