▎ 摘　　要

NOVELTY - The graphene sheet manufacturing device performs deposition process in a process chamber mounted with a susceptor. Substrates are rotatably mounted within the susceptor. An emission unit is arranged on top of susceptor against the substrate. Catalyst and graphene layers are formed on the substrate by a catalyst source and a carbon source respectively. A gas controller is installed in the emission unit to selectively offer catalyst source and carbon source. The catalyst layer and the graphene layer are evaporated in-situ by using an atomic layer deposition. USE - Graphene sheet manufacturing device. ADVANTAGE - The large area graphene sheet can be manufactured effectively by performing the evaporation process of catalyst layer and graphene layer by atomic layer deposition. The manufacturing cost and time of graphene sheet can be reduced, by inexpensively manufacturing carbon nanotube and secondary battery. The shape and thickness of graphene sheet can be freely controlled. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene sheet manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart explaining the graphene sheet manufacturing device. (Drawing includes non-English language text) Step for evaporating carbon on catalyst layer (S11) Steps for forming graphene layer by evaporating monolayer of carbon (S12,S13) Step for removing catalyst layer from substrate using predetermined liquid medicine (S14) Step for separating graphene sheet (S15)