• 专利标题:   Enhanced graphene film coating device based on plasma chemical vapor deposition (PECVD), has concave lantern ring supporting rod whose upper portion is provided with pushing plate, and bidirectional transmission screw rod whose end is provided.
  • 专利号:   CN217628609-U
  • 发明人:   DENG Z, TANG W, HUANG X, BAI J, SHI Y, LI B
  • 专利权人:   AVICINT PROJECT ENG CO, CHENGDU AERONAUTIC POLYTECHNIC
  • 国际专利分类:   C23C016/26, C23C016/50, C23C016/503, C23C016/54
  • 专利详细信息:   CN217628609-U 21 Oct 2022 C23C-016/26 202287 Chinese
  • 申请详细信息:   CN217628609-U CN20949272 21 Apr 2022
  • 优先权号:   CN20949272

▎ 摘  要

NOVELTY - The utility model claims a reinforced graphene film coating device based on PECVD, specifically relating to the technical field of film production, comprising a coating upper frame box, the lower part of the coating upper frame box is provided with a sealing embedded plate, and the lower part of the sealing embedded plate is provided with a mounting mechanism; the mounting mechanism comprises a plating film lower frame box set below the sealing embedding plate, one side of the coating film lower frame box is connected with a fixing frame. The utility model is provided with a mounting mechanism, the second sleeve screw ring concave block moves to the right under the action of the screw thread, the second sleeve screw ring concave block drives the top end of the hinge sleeve ring rod to move upwards, the concave sleeve ring rod drives the pushing plate to move upwards, a large gap is generated between the sealing embedding plate and the coating film lower frame box, when mounting the film, there is no need to blindly pass through the inner part of the upper frame box of the coating film, the side surface is directly mounted, so the mounting is more accurate, it is not easy to cause damage, and it is more convenient to install.