• 专利标题:   Graphene thin film formation method for semiconductor device, involves spraying graphene dispersed solution on substrate, preparing oxidation graphite, adding hydrazine in oxidation graphite, and diluting graphene dispersed solution.
  • 专利号:   KR2010121978-A, KR1071224-B1
  • 发明人:   SEOK JEONG J, JEONG KIM U, BETEU HONG P, HAI DIN P, PAN TU DUEONG W, BIET KUEONG T, CHUNG J S, KIM E J, PHAM V H, PHAM H D, NGUYEN P T D, TRAN V C
  • 专利权人:   UNIV ULSAN FOUND IND COOP
  • 国际专利分类:   H01L021/20, H01L021/208
  • 专利详细信息:   KR2010121978-A 19 Nov 2010 201104 Pages: 11
  • 申请详细信息:   KR2010121978-A KR040947 11 May 2009
  • 优先权号:   KR040947

▎ 摘  要

NOVELTY - The method involves spraying graphene dispersed solution on a substrate. Oxidation graphite is prepared, and hydrazine is added to the oxidation graphite, where concentration of the oxidation graphite is 0.001 to 100 mg per ml. The graphene dispersed solution is diluted by adding a mixture of ethylene glycol, dimethylformamide, N-methylpyrolidone and dimethyl sulphoxide. USE - Method for forming a graphene thin film of a semiconductor device. ADVANTAGE - The method enables formation of the graphene thin film with high quality, high conductivity and excellent transparency in an economic manner. DESCRIPTION OF DRAWING(S) - The drawing shows a graphical representation illustrating UV absorbance peak of a graphene thin film.