• 专利标题:   Semiconductor pn structure e.g. trench-type MOSFET for semiconductor device, has graphene layer that blocks magnesium elements from diffusing to one base layer and is suitable for blocking molybdenum element of one substrate to diffuse.
  • 专利号:   CN114899220-A
  • 发明人:   WANG J, WEI T, RAN J
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/331, H01L029/06, H01L029/20, H01L029/737, H01L033/00, H01L033/14
  • 专利详细信息:   CN114899220-A 12 Aug 2022 H01L-029/06 202279 Chinese
  • 申请详细信息:   CN114899220-A CN10555452 19 May 2022
  • 优先权号:   CN10555452

▎ 摘  要

NOVELTY - The structure has a first substrate layer (1) and a second substrate layer (2). The p-type gallium nitride-based material is doped with magnesium elements and grown on the first base layer. A graphene layer (3) is placed on the second base layer. A third substrate layer (4) is provided with an n-type gold nitride base material growing on the graphene layer, where the second and third base materials form a pn junction. The graphene layer blocks the magnesium elements from diffusing to the third base layer and is suitable for blocking the molybdenum element of the second substrate to diffuse. USE - Semiconductor pn structure e.g. trench-type MOSFET for semiconductor device (claimed), used in microelectronics and optoelectronic applications. ADVANTAGE - The forward conduction and reverse cut-off characteristics of the semiconductor pn structure is improved. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for: (1) a preparation method of semiconductor pn structure; and (2) a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram illustrating the semiconductor pn structure. (Drawing includes non-English language text) 1First substrate layer 2Second substrate layer 3Graphene layer 4Third substrate layer