• 专利标题:   Forming method of microstructure device such as integrated circuits involves providing thermally conductive filler material including graphene flakes, between microstructure device chip and substrate.
  • 专利号:   US2016079144-A1, US9892994-B2
  • 发明人:   SCURATI M G, CERIATI L, BENINI L
  • 专利权人:   STMICROELECTRONICS SRL, STMICROELECTRONICS SRL
  • 国际专利分类:   H01L021/56, H01L021/78, H01L023/00, H01L023/373, H01L023/42, B29C065/48, B29C065/54
  • 专利详细信息:   US2016079144-A1 17 Mar 2016 H01L-023/373 201622 Pages: 17 English
  • 申请详细信息:   US2016079144-A1 US946502 19 Nov 2015
  • 优先权号:   ITVI0077

▎ 摘  要

NOVELTY - The method involves positioning a microstructure device chip (320A-320D) above a surface of a substrate (310), and providing a filler material (360A,360B) that is thermally conductive and includes graphene flakes (361A,361B), between the microstructure device chip and the substrate. The thermally conductive filler material includes a glue substance incorporating the graphene flakes. USE - Forming method of microstructure device such as integrated circuits. ADVANTAGE - Achieves heat dissipation and thermal management of semiconductor devices by exploiting superior thermal conductivity of graphene efficiently to achieve pronounced layer internal heat distribution which highly and efficiently transports heat energy from the microstructure device chip to the entire lead frame. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the microstructure device. Substrate (310) Microstructure device chip (320A-320D) Passive cooling component (340) Filler material (360A,360B) Graphene flakes (361A,361B)