• 专利标题:   Manufacture of semiconductor element used for electronic device, involves forming opening portion which reaches back surface of catalyst layer formed on substrate, forming graphene on back surface and removing portion of catalyst layer.
  • 专利号:   JP2013110156-A, JP5857659-B2
  • 发明人:   KOJIMA E, FURUICHI T
  • 专利权人:   DENSO CORP, DENSO CORP
  • 国际专利分类:   C01B031/02, H01L021/205, H01L021/336, H01L029/06, H01L029/786, H01L051/30, H01L051/40
  • 专利详细信息:   JP2013110156-A 06 Jun 2013 H01L-029/786 201339 Pages: 13 Japanese
  • 申请详细信息:   JP2013110156-A JP251693 17 Nov 2011
  • 优先权号:   JP251693

▎ 摘  要

NOVELTY - Manufacture of semiconductor element involves forming opening portion (1c) which reaches back surface (3a) of catalyst layer (3) from side (1b) opposite to side (1a) of substrate in which catalyst layer is formed on side (1a), forming graphene (5) on back surface of the catalyst layer in the opening portion, and removing portion(s) of the catalyst layer. USE - Manufacture of semiconductor element used for electronic device. ADVANTAGE - In the semiconductor element, peeling of graphene is suppressed and stickiness between the substrates is hardly produced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for semiconductor element, which has substrate with opening portion penetrated from side (1a) to side (1b), and graphene formed on region containing opening portion among one surfaces in substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the manufacture of semiconductor element. Sides (1a,1b) Opening portion (1c) Catalyst layer (3) Back surface (3a) Graphene (5)