• 专利标题:   Method for transferring graphene and performing photolithography process on UV photoresist support layer, involves washing photoresist to obtain patterned graphene.
  • 专利号:   CN111158215-A
  • 发明人:   LV C, LU M, XU Y
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   G03F007/11
  • 专利详细信息:   CN111158215-A 15 May 2020 G03F-007/11 202045 Pages: 6 Chinese
  • 申请详细信息:   CN111158215-A CN11400367 30 Dec 2019
  • 优先权号:   CN11400367

▎ 摘  要

NOVELTY - The method involves performing spin-coating UV photoresist process on a CVD-grown graphene copper foil substrate. A copper foil is uniformly cut according to pre-required graphene sheet size. The copper foil is placed in copper foil etching solution. The copper foil etching solution is placed in a dark environment to completely corrode the copper foil substrate. The UV photoresist attached with a graphene is transferred to deionized water after the copper foil substrate is etched. The UV photoresist is transferred to a target substrate. Photolithography and development process is performed on the UV photoresist attached with the graphene. The UV photoresist is washed to obtain a patterned graphene. USE - Method for transferring graphene and performing photolithography process on a UV photoresist support layer. ADVANTAGE - The method enables reducing weak contact between the graphene and the substrate when removing a support layer so as to improve device manufacturing and performance analysis convenience. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic chart illustrating a method for transferring graphene and performing photolithography process on a UV photoresist support layer. (Drawing includes non-English language text).