• 专利标题:   Suspension and insertion type quartz boat for growing graphene useful for placing in quartz tube of chemical vapor deposition system, comprises boat frame disposed above boat seat, and boat frame including upper and lower cross frames.
  • 专利号:   CN110937594-A, CN211946285-U
  • 发明人:   QIU F, XIANG J, LV W, SHEN S, HUANG T, CHU J, ZHANG W, LIU Z, LV F
  • 专利权人:   UNIV YUNNAN
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN110937594-A 31 Mar 2020 C01B-032/186 202033 Pages: 9 Chinese
  • 申请详细信息:   CN110937594-A CN11343909 24 Dec 2019
  • 优先权号:   CN11343909, CN22355045

▎ 摘  要

NOVELTY - Suspension and insertion type quartz boat for growing graphene comprises a boat frame disposed above a boat seat, and the boat frame including an upper cross frame and/or a lower cross frame. The upper cross frame comprises at least one first cross bar parallel to the longitudinal direction of the boat seat, and/or just a second cross bar perpendicular to the longitudinal direction of the boat seat, and a support bar for supporting the first cross bar and/or the second cross bar. The lower cross frame includes: at least two third cross bars parallel to the longitudinal direction of the boat seat, and/or at least two fourth cross bars perpendicular to the longitudinal direction of the boat seat. The two third cross bars of the pair of third cross bars each provided with at least one slot, and slots on two third cross bars. The two fourth cross bars of pair of fourth cross bars are each provided with at least one slot, and slots on the two fourth cross bars correspond to each other. USE - The quartz boat is useful for placing in quartz tube of chemical vapor deposition (CVD) system (claimed). ADVANTAGE - The quartz boat: can realize the controlled growth of graphene; has no tilting in the push-pull quartz boat, ensures the sample position does not change; grows graphene by suspension and insertion to avoid large-area contact between the quartz stage and the metal substrate, and grows the high-quality graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for growing graphene on suspension and insertion type quartz boat. DESCRIPTION OF DRAWING(S) - The drawing shows a left side view of the suspension and insertion type quartz boat for growing graphene.