• 专利标题:   Capacitive ultrasonic transducer, has graphene layer provided lower electrode, where cavity is formed between graphene layer and lower electrode to form plate capacitor structure and diameter of circular hole is specific in range.
  • 专利号:   CN108722837-A
  • 发明人:   CUI K, ZHU H, CAI X, HUANG Y, LIU F, FENG X, ZHANG W
  • 专利权人:   UNIV TSINGHUA
  • 国际专利分类:   B06B001/02, B32B037/00, B32B009/00, B32B009/04
  • 专利详细信息:   CN108722837-A 02 Nov 2018 B06B-001/02 201878 Pages: 11 Chinese
  • 申请详细信息:   CN108722837-A CN10497011 22 May 2018
  • 优先权号:   CN10497011

▎ 摘  要

NOVELTY - The transducer has a substrate whose bottom part is formed with an insulating layer and top part is formed with a graphene layer. The graphene layer is provided a lower electrode. A cavity i.e. circular hole, is formed between the graphene layer and the lower electrode to form a plate capacitor structure, where diameter of the circular hole is about 0.5-200 to m microns. The substrate is made of silicon dioxide or flexible organic material. The lower electrode is made of germanium and gold composite metal electrode, polysilicon electrode and/or transparent conductive glass. USE - Capacitive ultrasonic transducer. ADVANTAGE - The transducer has high sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a capacitive ultrasonic transducer manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a capacitive ultrasonic transducer.