▎ 摘　　要

NOVELTY - The microbolometer has conductive terminals in electrical communication with a graphene nanoribbon thin film. The graphene nanoribbon thin film is tuned such that exposure of radiation induces a change in impedance between the conductive terminals sensed by a CMOS readout circuitry. The nanoribbon thin film increases sensitivity of a detector by exposing the nanoribbon thin film to an oxidation environment, which increases thermal coefficient of resistance (TCR) to excess of 4 percent per degree centigrade resulting in a noise equivalent delta temperature (NEDT) of less than 10 mK. USE - Graphene based microbolometer for a UV, infrared and terahertz radiation detecting and sensing system. ADVANTAGE - The microbolometer allows a detection circuit to provide electrical outputs for sufficient light detection from a nanotube article in proximity of a predefined region by use of preamplification in an efficient manner. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a photo-FET device structure incorporating a graphene layer or multilayer. Source (701) Drain contact (702) Silicon oxide layer (703) Substrate (704) Graphene layer (705) CMOS compatible thin film metal (706) Metal or oxide gate electrode (707)