• 专利标题:   Apparatus for producing two-dimensional (2D) material e.g., graphene comprises carrier substrate having 2D surface, 2D sheet for growing 2D material, furnace which forms a tubular volume around the carrier substrate and sheet, and heater.
  • 专利号:   US10533264-B1
  • 发明人:   SHERRILL J V, ERICKSON G
  • 专利权人:   GEN GRAPHENE CORP
  • 国际专利分类:   C01B031/04, C30B025/10, C30B025/12, C30B025/14, C30B029/02
  • 专利详细信息:   US10533264-B1 14 Jan 2020 C30B-025/14 202007 Pages: 27 English
  • 申请详细信息:   US10533264-B1 US362146 28 Nov 2016
  • 优先权号:   US262145P, US362146

▎ 摘  要

NOVELTY - An apparatus for producing two-dimensional (2D) material comprises a carrier substrate having a two-dimensional surface; two-dimensional sheet for growing 2D material, and is disposed on 2D surface of carrier substrate; a furnace (42) which forms a tubular volume around the carrier substrate and sheet in which tubular volume is open to atmosphere around the furnace such that gas may flow out of tubular volume to atmosphere around the furnace, a gas supply for supplying a flow of purge gas through greater than or equal to 1 supply port to purge the tubular volume and for supplying a flow of donor gas into the tubular volume after tubular volume has been purged with the purge gas, and a heater for heating the sheet to a temperature sufficient to form 2D material on sheet when the donor gas is supplied into the tubular volume. USE - An apparatus for producing two-dimensional (2D) material e.g., graphene (claimed). ADVANTAGE - The apparatus produces 2D material such as graphene on a forming sheet disposed on a carrier and exposed to a donor gas within a furnace. Undesirable gasses are purged and desirable gasses are maintained in both the furnace and the gas chamber. DETAILED DESCRIPTION - An apparatus for producing two-dimensional (2D) material comprises a carrier substrate having a two-dimensional surface; two-dimensional sheet for growing 2D material, and is disposed on 2D surface of carrier substrate; a furnace (42) which forms a tubular volume around the carrier substrate and sheet in which tubular volume is open to atmosphere around the furnace such that gas may flow out of tubular volume to atmosphere around the furnace in which furnace further includes an entrance formed in the furnace, exit formed in furnace, support extending from entrance to exit and supports the carrier substrate in tubular volume in the furnace, a unit for driving the carrier and sheet disposed on carrier through the furnace in which carrier is disposed on support as it moves through the furnace and the sheet is disposed on carrier for moving with the carrier through the furnace in a direction of travel, a 1st 2D furnace surface which is disposed in tubular volume of furnace and disposed adjacent to and spaced apart from 2D sheet such that 1st 2D furnace surface is facing the 2D sheet when carrier substrate is disposed on support, 1st and 2nd side walls extending from 1st 2D furnace surface, extending from entrance to the exit, which are disposed on opposite sides of sheet, being parallel to the direction of travel of the sheet, such that tubular volume extends from entrance to exit formed by 1st 2D furnace surface, 1st and 2nd side walls, and the sheet and carrier disposed on support, greater than or equal to 1 supply port for providing a flow of gas into tubular volume such that the gas flows in 1st direction through the tubular volume and through the entrance to atmosphere around the furnace, and such that gas flows in 2nd direction through the tubular volume and through the exit to atmosphere around the furnace and inhibits gasses from flowing into the tubular volume from entrance and exit, a gas supply for supplying a flow of purge gas through greater than or equal to 1 supply port to purge the tubular volume and for supplying a flow of donor gas into the tubular volume after tubular volume has been purged with the purge gas, and a heater for heating the sheet to a temperature sufficient to form 2D material on sheet when the donor gas is supplied into the tubular volume. An INDEPENDENT CLAIM is included for apparatus for producing graphene comprising a reaction chamber (24) having a gas confining space extending through reaction chamber from a chamber entrance to a chamber exit, where chamber entrance and chamber exit are open to the atmosphere around the reaction chamber such that gas confining space is open to the atmosphere; a support extending through the gas confining space of reaction chamber from the chamber entrance to the chamber exit; carriers which are positioned on the support, each of carriers includes a top surface and a sheet suitable for growing graphene disposed across the top surface, and move on the support through gas confining space from the chamber entrance and through the chamber exit while the gas confining space if open to the atmosphere; a drive mechanism having a surface that engages greater than or equal to 1 of carriers for moving the carriers through gas confining space; heaters which are disposed adjacent the gas confining space for heating the sheets to greater than or equal to 900 degrees C to grow graphene on sheets as carriers are driven through the gas confining space of the reaction chamber; ports which introduce gas into the gas confining space such that the gas confining space is maintained at a positive pressure as carriers are driven through the gas confining space; and gas supply supplying the gas to ports, and includes donor gas operable to donate carbon atoms to react with the sheets stretched across the top surface of carriers and heated by the heaters to grow graphene on the sheets. DESCRIPTION OF DRAWING(S) - The drawing shows a close-up perspective view of the entrance to the furnace. Cartridge (22) Copper forming sheets (23) Reaction chamber (24) Manifold (26) Furnace (42)