• 专利标题:   Pressure sensor based on snake-shaped graphene piezoresistor, has novel thin film structure introduced with trapezoidal prism and snake-like voltage dependent resistor made of graphene material.
  • 专利号:   CN115112274-A, CN115112274-B
  • 发明人:   JIANG X, YANG D, SU X, REN X, LIU X
  • 专利权人:   UNIV CHANGZHOU
  • 国际专利分类:   G01L001/18, G01L009/06
  • 专利详细信息:   CN115112274-A 27 Sep 2022 G01L-001/18 202284 Chinese
  • 申请详细信息:   CN115112274-A CN10751886 28 Jun 2022
  • 优先权号:   CN10751886

▎ 摘  要

NOVELTY - The sensor has a novel thin film structure that is introduced with trapezoidal prism and a snake-like voltage dependent resistor made of graphene material. USE - Pressure sensor based on snake-shaped graphene piezoresistor for aerospace, automobile and biomedicine applications. ADVANTAGE - The pressure sensor has high conductivity, high toughness, Young modulus of 1Tpa and good pressure resistance characteristics. The graphene material greatly improves the working performance of the sensor, which not only improves the sensitivity about 21% but also reduces the non-linear degree by half. The method promotes the pressure sensor to improve the sensitivity to the utmost extent and still keeps the very low nonlinear error. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the design method of pressure sensor based on snakelike graphene voltage dependent resistor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the pressure sensor. 111Four snake-shaped voltage dependent resistor 112Metal lead 114First concentrated stress region 115Second concentrated stress region 116Four trapezoidal terrace