• 专利标题:   Forming metallization structure for metallizing fine pitch of semiconductor, by forming graphene oxide layer on substrate, modifying graphene oxide layer, and performing metallization process on graphene oxide catalytic layer.
  • 专利号:   US2020260591-A1
  • 发明人:   YEN M
  • 专利权人:   IND TECHNOLOGY RES INST
  • 国际专利分类:   C23C018/16, C23C018/18, H05K001/09, H05K003/18
  • 专利详细信息:   US2020260591-A1 13 Aug 2020 H05K-003/18 202069 Pages: 12 English
  • 申请详细信息:   US2020260591-A1 US859403 27 Apr 2020
  • 优先权号:   US851054, US859403

▎ 摘  要

NOVELTY - Method for forming the metallization structure, involves providing a substrate, forming a graphene oxide layer on the substrate, modifying the graphene oxide layer to form a graphene oxide catalytic layer, and performing a metallization process on the graphene oxide catalytic layer. USE - The method is used for forming the metallization structure, which is used for the metallization of fine pitch of semiconductor and its package, fine pitch wires of printed circuit board, touch panels, displays, and fine electrodes of solar cells. ADVANTAGE - The method prepares fine pitch wire metallization, improves the reliability and yield, eliminates an etching process, avoids warpage, reduces undercut, and reduces the formation of poor metal profile or wire collapse.