▎ 摘　　要

NOVELTY - The plasma process apparatus a reactor comprising first and second electrode portions to feed constant high voltage for plasma discharge reaction generated in a zig-zag shaped processing channel in which a processing object material and a process gas are injected. The processing channel in which the first and second electrode portions are formed is connected to both ends of a power supply unit. The reactor processes the object material supplied through an inlet part to an inner portion of the reactor. The process gas reacts with the object material in the reactor inner portion. USE - The plasma process apparatus is useful for processing an object material such as graphene and carbon nanotube used in the fabrication of an electronic circuit integration element such as transistor, resistor and memory device. ADVANTAGE - The plasma process apparatus maintains the electrical and physical properties of the processing material inside the reactor. DETAILED DESCRIPTION - The plasma process apparatus a reactor comprising first and second electrode portions to feed constant high voltage for plasma discharge reaction generated in a zig-zag shaped processing channel in which a processing object material and a process gas are injected. The processing channel in which the first and second electrode portions are formed is connected to both ends of a power supply unit. The reactor processes the object material supplied through an inlet part to an inner portion of the reactor. The process gas reacts with the object material in the reactor inner portion. An outlet part discharges the processed material from the reactor inner portion. The inlet part and outlet part are installed through the first and second electrode portions of the reactor. The first and second electrode portions are formed in a lower side of the apparatus. A redirection part of the processing channel is in a form of round shape. The reactor is present in a form of circular, disk and a square. The process gas comprises an inert gas, an active gas or a mixture of the active gas and inert gas.