▎ 摘 要
NOVELTY - A substrate (20) is provided, and a laser beam is focused in the presence of a carbon doping gas to induce two photon photolytic decomposition of the carbon doping gas only near the gas-substrate surface interface at the laser focal point to produce a plane of atomic carbon with carbon-carbon bonds in a hexagonal array. The laser beam is continuing focused to photolytically react the carbon with the substrate to grow graphene. USE - Production of graphene used in manufacture of semiconductor devices. Uses include but are not limited to conductive tabs, interconnects, vias, wiring patterns, resistors and capacitors. ADVANTAGE - The graphene is efficiently produced with excellent thermal conductivity and electrical property. DESCRIPTION OF DRAWING(S) - The drawing shows the side view of air-tight chamber with thermal energy beam impinging on non-wide bandgap material. Non-wide bandgap material (3) Apparatus (5) Wide bandgap material (10) Substrate (20) Thermal energy beam (40)