• 专利标题:   Manufacturing method of electronic apparatus, involves placing graphene layer in contact with liquid film, placing laminated structure on liquid film and vaporizing liquid film to bring graphene layer into contact with second substrate.
  • 专利号:   JP2023041282-A
  • 发明人:   SUDA S
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L021/336, H01L029/786, H10K010/40, H10K071/10, H10K085/20
  • 专利详细信息:   JP2023041282-A 24 Mar 2023 H10K-085/20 202336 Pages: 22 Japanese
  • 申请详细信息:   JP2023041282-A JP148552 13 Sep 2021
  • 优先权号:   JP148552

▎ 摘  要

NOVELTY - The method involves growing a graphene layer (31) on a first substrate. The graphene layer is brought into close contact with a holding frame (32). A laminated structure (33) of the graphene layer and the holding frame are peeled from the first substrate. A volatile liquid film (23) is formed on a second substrate (20). The graphene layer is placed in contact with the liquid film. The laminated structure is placed on the liquid film. The liquid film is vaporized to bring the graphene layer into contact with the second substrate. The holding frame is removed after bringing the graphene layer into contact with the second substrate. USE - Manufacturing method for electronic apparatus. ADVANTAGE - The method enables manufacture of electronic device capable of suppressing deformation of graphene layer during transfer. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the manufacturing method for the electronic apparatus. (Drawing includes non-English language text) 20Second substrate 23Volatile liquid film 31Graphene layer 32Holding frame 33Laminated structure