▎ 摘　　要

NOVELTY - Method for detecting abnormal growth of graphene, involves preparing an inspected object having a graphene film formed by chemical vapor deposition (CVD) on a substrate, using a dark-field optical system to receive light from the graphene film, and detecting abnormal growth of graphene by inspecting the received light. USE - The method is useful for detecting abnormal growth of graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a device for detecting abnormal growth of graphene comprising a dark-field optical system that irradiates a graphene film formed by CVD on a substrate with light and receives scattered light, and an apparatus having a photodetector for detecting the light intensity of light received by the dark field optical system, and detecting abnormal growth of the graphene based on the detection result of the photodetector.