▎ 摘　　要

NOVELTY - Photonic crystal sensor is located on a silicon dioxide substrate, and its production materials include silicon, graphene and humidity-sensitive material polyvinyl alcohol (PVA). The thicknesses of the silicon dioxide substrate, silicon core layer, and PVA cladding layer are respectively 2µm, 220nm, and 2µm. The sensor includes a waveguide, a one-dimensional photonic crystal stack structure, and a one-dimensional photonic crystal nanobeam structure covered with graphene. The sensor uses graphene to actively tune the electromagnetically induced transparency (EIT)-like effect and apply it to the dual-parameter sensing of relative humidity and temperature. USE - Photonic crystal sensor. ADVANTAGE - The graphene has excellent photoelectric property, can regulate and control the charge of graphene easily by the mode of adjusting external voltage meter energy level, thus fine-tuning the resonance wavelength of the nanobeam structure to change the transparent window of the EIT-like effect, and realizing the active tuning of the EIT-like effect without adjusting the structural parameters of the sensor.