• 专利标题:   Optical device of laser pulse apparatus for manufacturing potonic integrated circuits, comprises graphene film which is positioned on core layer, in which core layer and cladding layer are formed of polymer.
  • 专利号:   KR2019128876-A, KR2132809-B1
  • 发明人:   SONG Y, RYU B W, LEE S J
  • 专利权人:   KOREA INST SCI TECHNOLOGY
  • 国际专利分类:   H01S003/067
  • 专利详细信息:   KR2019128876-A 19 Nov 2019 H01S-003/067 201998 Pages: 14
  • 申请详细信息:   KR2019128876-A KR053155 09 May 2018
  • 优先权号:   KR053155

▎ 摘  要

NOVELTY - The optical device comprises a core layer having a core, a cladding layer surrounding a portion of the core layer, a substrate surrounding the cladding layer, and a graphene film which is positioned on the core layer. The core layer and the cladding layer are formed of polymer. The cladding layer is formed of flexible polymer. The cladding layer and the core layer are formed of the same flexible polymer. The refractive index of the cladding layer is 1.45 and the refractive index of the core layer is 1.455 at a wavelength of 1550 nm. The core has a trapezoidal cross-section and whose upper surface has a width of 0.1-15 mu m and height of 0.1-15 mu m. USE - Optical device of laser pulse apparatus (claimed) for generating laser pulse from input continuous wave laser, used for lithography techniques such as electron-beam (E-beam) or deep-UV lithography for manufacturing potonic integrated circuits (PICs). ADVANTAGE - The optical device uses a graphene film located on a flexible polymer to generate high quality laser pulses. Hence high quality laser pulses having flexible characteristics and beyond the limitation of using rigid silicon substrate-based optical device are produced, so that the range of optical device is widened. The optical device is miniaturized and the efficiency is increased. DESCRIPTION OF DRAWING(S) - The drawing shows a conceptual diagram of the optical device.