• 专利标题:   Synthesizing graphene-like layers at predetermined depth of porous silicon structures, comprises carrying out chemical vapor deposition process in reaction zone in ethanol vapor in inert gas at the differential pressure mode in working zone.
  • 专利号:   RU2018106508-A
  • 发明人:   STARKOV V V, SEDLOVETS D M, REDKIN A N, GOSTEVA E A, DRUZHININ A V
  • 专利权人:   AS RUSSIA PROBLEMS TECHNOLOGY MICROELECT
  • 国际专利分类:   C01B033/00
  • 专利详细信息:   RU2018106508-A 03 May 2018 C01B-033/00 201843 Pages: 1 Russian
  • 申请详细信息:   RU2018106508-A RU106508 21 Feb 2018
  • 优先权号:   RU106508

▎ 摘  要

NOVELTY - Synthesizing graphene-like layers at a predetermined depth of porous silicon structures, comprises carrying out the chemical vapor deposition process in the reaction zone at a temperature of 800-1100 degrees C in ethanol vapor in an inert gas at the differential pressure mode of 5x 104 to 1x 103 Pa in the working zone, where the regime of pressure drop in the working zone is repeated after 9-11 minutes before the creation of graphene-like layers on the walls of the pores at a given depth of porous silicon structures. USE - The method is useful for synthesizing graphene-like layers at a predetermined depth of porous silicon structures.