• 专利标题:   Dicing tape useful for fixing semiconductor wafer, comprises adhesive layer formed on one surface of conductive base film made of carbon nanotubes and graphene and attached to rear surface of semiconductor wafer.
  • 专利号:   KR2021098029-A, KR2359469-B1
  • 发明人:   KYOUNGJEONGBAE
  • 专利权人:   ELEMENT CO LTD KB
  • 国际专利分类:   C08K003/04, C09J007/22, H01L021/683
  • 专利详细信息:   KR2021098029-A 10 Aug 2021 C09J-007/22 202169 Pages: 8
  • 申请详细信息:   KR2021098029-A KR011709 31 Jan 2020
  • 优先权号:   KR011709

▎ 摘  要

NOVELTY - Dicing tape comprises a conductive base film (110); and an adhesive layer (120) formed on one surface of the base film and attached to the rear surface of a semiconductor wafer (200). The base film includes carbon nanotubes and/or graphene. USE - The dicing tape is useful for fixing semiconductor wafer. ADVANTAGE - The dicing tape prevents static electricity defects in manufacturing semiconductor chip. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for producing dicing tape comprising (a) preparing a polyimide solvent, (b) dispersing carbon nanotubes or graphene hybrids in dimethylacetamide solvent to form a first mixed solution, (c) forming a second mixed solution by mixing the polyimide solvent and the first mixed solution, and (d) casting the second mixed solution on a support, drying, peeling and then curing. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the semiconductor wafer mounted on dicing tape. Conductive base film (110) Adhesive layer (120) Semiconductor wafer (200)