▎ 摘 要
NOVELTY - The utility model claims a graphene growth device with double sealing structure deposition chamber, comprising: a deposition chamber, a heating box, a double sealing structure, an air pumping system and an inflation system; the deposition chamber is a tube body with openings at two ends; the heating box is hermetically covered on the outer side of the deposition chamber; the number of the double sealing structure is two, and respectively connected with the two ends of the opening of the deposition chamber; the double sealing structure comprises a three-way valve, a sealing pipe and a sealing end; the reversing opening of the three-way valve is connected with the deposition chamber; one end opening of the sealing pipe is connected with the outlet of the three-way valve; the sealing end is sealed and fixed at the other end opening of the sealing pipe; the number of the pumping system is two, and respectively hermetically connected with the inlet of the three-way valve; the inflation system is hermetically connected with the inlet of a three-way valve. The utility model overcomes the defect that the existing technology when preparing a certain size of graphene, the device has bad tightness, which is good for stably preparing high quality large area graphene.