• 专利标题:   Patterning two-dimensional material layer comprises forming two-dimensional material layer in both first region and second region, and removing two-dimensional material layer from second region based on using physical removal method.
  • 专利号:   US2022238692-A1, KR2022107577-A
  • 发明人:   CHO Y, YOO M, SHIN H, KWON J, SEOL M, NGUYEN V L, SHIN H J, YOO M S, CHO Y C
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/02, H01L021/304, H01L021/463, H01L029/66, H01L029/16, H01L029/24
  • 专利详细信息:   US2022238692-A1 28 Jul 2022 H01L-029/66 202263 English
  • 申请详细信息:   US2022238692-A1 US546303 09 Dec 2021
  • 优先权号:   KR010355

▎ 摘  要

NOVELTY - Patterning two-dimensional (2D) material layer comprises selectively forming a first material layer on a surface of a substrate to form a first region in which the first material layer covers the surface of the substrate and to form a second region in which the surface of the substrate is exposed from the first material layer. The first material layer has a strong adhesive force with a 2D material. The 2D material layer is formed in both the first region and the second region. The 2D material layer is removed from the second region based on using a physical removal method and not removing the 2D material layer from the first region, such that the 2D material layer remains exclusively in the first region. USE - Method for patterning a two-dimensional material layer. ADVANTAGE - The method reduces process time and contamination of the channel layer after patterning, and increases carrier mobility (electron mobility) in a thickness direction of the 2D material layer by the intercalation material using graphene material having a hexagonal honeycomb structure with high electrical mobility, high thermal properties, chemical stability, and large surface area, and thus improves performance and operation characteristics of the semiconductor device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a semiconductor device, which involves selectively forming a first material layer on a surface of a substrate to form a first region, forming a 2D material layer having a layered structure of a 2D material in both the first region and the second region, forming a channel layer based on removing the 2D material layer from the second region, forming a first electrode and a second electrode, and forming a third electrode extending in parallel with the channel layer.