• 专利标题:   Preparation of double-layer torsion angle graphene monocrystalline wafer, by annealing copper-nickel monocrystalline substrate in chemical vapor deposition furnace under gas atmosphere of argon and hydrogen to improve crystal quality, and growing under atmosphere of argon, hydrogen and methane.
  • 专利号:   CN114525581-A
  • 发明人:   XIE X, YU Q, ZHAO Y, ZHANG X
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C30B025/02, C30B025/18, C30B029/02
  • 专利详细信息:   CN114525581-A 24 May 2022 C30B-029/02 202275 Chinese
  • 申请详细信息:   CN114525581-A CN10129361 11 Feb 2022
  • 优先权号:   CN10129361

▎ 摘  要

NOVELTY - Preparation of double-layer 30° torsion angle graphene monocrystalline wafer involves: providing a copper-nickel monocrystalline substrate, which has a thickness of 300-800 nm and nickel atom content of 15-22% of the total number of atoms; and adding the substrate to a chemical vapor deposition furnace, and annealing under gas atmosphere of argon and hydrogen in a ratio of (100-300 sccm):(5-15 sccm) and 1050-1100℃ to improve crystal quality, and growing under the atmosphere of argon, hydrogen and methane in a ratio of (100-300 sccm):(5-15 sccm):(0.025-0.5 sccm) and 1050-1100℃. Each layer of graphene of double-layer 30° torsion angle monocrystalline wafer is monocrystalline graphene, and the torsion angle between the double-layer graphenes is 30°. USE - Preparation of double-layer 30° torsion angle graphene monocrystalline wafer. ADVANTAGE - The method uses copper-nickel monocrystalline film as a substrate to obtain large-sized wafer-level double-layer 30° torsion angle graphene monocrystalline wafer by combining annealing and growing stages.