• 专利标题:   Manufacturing method of graphene laminated structure, involves setting film thickness of iron carbide film more than thickness of boron nitride layer.
  • 专利号:   JP2016058631-A, JP6241398-B2
  • 发明人:   OSHIMA H
  • 专利权人:   DENSO CORP
  • 国际专利分类:   B32B009/00, C01B021/064, C01B031/02, H01L021/20, H01L029/06, H01L029/16, C01B032/15, C23C014/06, H01B005/14
  • 专利详细信息:   JP2016058631-A 21 Apr 2016 H01L-029/16 201631 Pages: 12 Japanese
  • 申请详细信息:   JP2016058631-A JP185370 11 Sep 2014
  • 优先权号:   JP185370

▎ 摘  要

NOVELTY - The manufacturing method involves forming a layered boron nitride layer (20) on one surface (11) of a substrate (10). A graphene (30) is stacked on one surface (21) of the boron nitride layer. An iron carbide film (50) is covered on one surface of the boron nitride layer. The carbon concentration in the iron carbide film becomes a range with satisfied numerical formula, when film thickness of the iron carbide film is set to T. The film thickness of the iron carbide film is 1.5 times or more of the thickness of the boron nitride layer. USE - Manufacturing method of graphene laminated structure. ADVANTAGE - The graphene is formed on the boron nitride layer, without using transcription. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view illustrating iron carbide film formation process for manufacturing graphene laminated structure. (Drawing includes non-English language text) Substrate (10) Surfaces (11,21) Layered boron nitride layer (20) Graphene (30) Iron carbide film (50)