▎ 摘　　要

NOVELTY - The modulator has a insulating medium layer (4) provided with a silicon waveguide layer (3) that is fixed with an aluminum oxide layer (2). A graphene layer (1) is fixed on the aluminum oxide layer for covering a metal structure. The graphene layer is provided with a single graphene layer and a metal structure layer. The single graphene layer is fixed at a lower surface of the metal structure layer. The metal structure layer is fixed with the silicon waveguide layer along vertical direction. The insulating medium layer is provided with a middle buried layer (41) and a bottom substrate (42). USE - Ultra-thin metal nano-particles based ultra-compact graphene electro-optical modulator. ADVANTAGE - The modulator is designed based on infrared wave band graphene electrical adjustable property and localized plasma resonance characteristics of a metal sheet so as to increases thin metal enhancement effect for realizing rapid modulated broadband light wave, thus realizing CMOS process in a compatible manner, reducing energy consumption rate of about 25fJ/bit and increasing modulation bandwidth of about 2 THz. The modulator is convenient to use in large data centers, internet of things (IOT) and cloud computing fields, and has high data transmission efficiency and high sheets on-chip communication speed. DETAILED DESCRIPTION - The graphene layer is formed as a rectangular-shaped structure. The single graphene layer loads a metal positive electrode and the silicon waveguide layer loads a metal negative electrode, where the metal positive electrode and the metal negative electrode are made of chromium and gold materials. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of an ultra-thin metal nano-particles based ultra-compact graphene electro-optical modulator. Graphene layer (1) Aluminum oxide layer (2) Silicon waveguide layer (3) Insulating medium layer (4) Middle buried layer (41) Bottom substrate (42)