• 专利标题:   Field effect transistor structure comprises a fin-shaped channel protruding from a substrate and extending in one direction, a source electrode on one side of the fin-shaped channel, and a drain electrode separated from the source electrode with the fin-shaped channel.
  • 专利号:   US2022328671-A1, KR2022141651-A
  • 发明人:   LEE E, YANG B, KIM S, CHOI T, LEE M, SHIN H, KIM C, SHIN H J, HYUN L, CHOI T J, YANG B S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L027/092, H01L029/06, H01L029/16, H01L029/20, H01L029/24, H01L029/423, H01L029/76, H01L029/786, H01L029/49, H01L021/8238, H01L029/78
  • 专利详细信息:   US2022328671-A1 13 Oct 2022 H01L-029/76 202284 English
  • 申请详细信息:   US2022328671-A1 US539768 01 Dec 2021
  • 优先权号:   KR048024

▎ 摘  要

NOVELTY - Field effect transistor structure (10) comprises a fin-shaped channel (120) protruding from a substrate (110) and extending in one direction, a source electrode (S) on one side of the fin-shaped channel, a drain electrode (D) separated from the source electrode with the fin-shaped channel, a gate insulating film surrounding side surfaces of the fin-shaped and upper surfaces of the fin-shaped channel, a gate electrode on the gate insulating film, and a two-dimensional semiconductor material layer between the gate insulating film and the gate electrode. USE - Field effect transistor structure. ADVANTAGE - The field effect transistor structure is capable of reducing the size of a field effect transistor and/or controlling a threshold voltage. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic perspective view of a field effect transistor structure. 10Field effect transistor structure 110Substrate 120Fin-shaped channel DDrain electrode SSource electrode