• 专利标题:   Graphene transfer, comprises e.g. forming two-dimensional film on surface of growth substrate, coating second surface of two-dimensional film, and etching surface of growth substrate to release film with layer coating from growth substrate.
  • 专利号:   US2017217777-A1
  • 发明人:   HONG J, KONG J
  • 专利权人:   MASSACHUSETTS INST TECHNOLOGY
  • 国际专利分类:   B05D001/00, C01B031/02
  • 专利详细信息:   US2017217777-A1 03 Aug 2017 C01B-031/02 201754 Pages: 14 English
  • 申请详细信息:   US2017217777-A1 US419090 30 Jan 2017
  • 优先权号:   US289202P, US419090

▎ 摘  要

NOVELTY - Graphene transfer, comprises e.g.: forming two-dimensional film on surface of growth substrate, where the two-dimensional film has first and second surfaces, and the first surface of two-dimensional film adheres to growth substrate; coating second surface of two-dimensional film, while adhered to growth substrate, with conforming carrier layer comprising ethylene vinyl acetate; etching surface of growth substrate to release two-dimensional film with layer coating from growth substrate; and after film is released, applying first surface of film with layer coating onto target substrate. USE - The method is useful for graphene transfer. ADVANTAGE - The method utilizes the ethylene vinyl acetate, which: is lighter, more flexible, ease-stretchable, less deformation than poly(methyl-methacrylate), and more pliable/conforming; exhibits higher thermal conductivity with a higher coefficient of thermal expansion, lower glass transition temperature, lower elastic modulus and high elongation capability; and renders feasible transfer of the graphene film to and from non-flat surfaces; and can be removed with xylene, which leaves less residue on the two-dimensional film, thus providing the two-dimensional film with better carrier mobility due to a cleaner surface. DETAILED DESCRIPTION - Graphene transfer, comprises: forming a two-dimensional film on a surface of a growth substrate, where a majority of the two-dimensional film has a thickness of not greater than 10 atomic layers and greater dimensions orthogonal to its thickness, the two-dimensional film has first and second surfaces that face in opposite directions, and the first surface of the two-dimensional film adheres to the growth substrate; coating the second surface of the two-dimensional film, while adhered to the growth substrate, with a conforming carrier layer comprising ethylene vinyl acetate; etching the surface of the growth substrate to release the two-dimensional film with the conforming carrier layer coating from the growth substrate, where the conforming carrier layer maintains the integrity of the two-dimensional film during and after its release from the growth substrate; after the two-dimensional film is released from the growth substrate, applying the first surface of the two-dimensional film with the conforming carrier layer coating onto a target substrate to form a two-dimensional coating on the target substrate; and removing the conforming carrier layer from the two-dimensional film by exposing the conforming carrier layer to a solvent while the two-dimensional film is coating the target substrate.