• 专利标题:   Transferring a graphene layer from a metal substrate to a second substrate by providing a graphene layer on the metal substrate, adsorbing hydrogen atoms on the metal substrate, and treating the metal substrate.
  • 专利号:   EP2849210-A1, US2015079399-A1, JP2015061810-A, US9982360-B2
  • 发明人:   HUYGHEBAERT C, VEREECKEN P M, POURTOIS G
  • 专利权人:   IMEC VZW, HUYGHEBAERT C, VEREECKEN P M, POURTOIS G, IMEC VZW
  • 国际专利分类:   H01L021/18, B32B037/00, B32B038/00, C01B031/04, C01B031/02, C01B032/19, C01B032/194, C25F005/00
  • 专利详细信息:   EP2849210-A1 18 Mar 2015 H01L-021/18 201521 Pages: 13 English
  • 申请详细信息:   EP2849210-A1 EP184696 17 Sep 2013
  • 优先权号:   EP184696

▎ 摘  要

NOVELTY - Transferring a graphene layer from a metal substrate to a second substrate, involves: (a) providing a graphene layer on the metal substrate; (b) adsorbing hydrogen atoms on the metal substrate by passing protons through the graphene layer; (c) treating the metal substrate having adsorbed hydrogen atoms thereon in such a way as to form hydrogen gas from the adsorbed hydrogen atoms, thus detaching the graphene layer from the metal substrate; (d) transferring the graphene layer to the second substrate; and (e) optionally reusing the metal substrate in a subsequent step (a). USE - The method and photo acid generator material are useful for transferring a graphene layer from a metal substrate to a second substrate (claimed). ADVANTAGE - The method provides efficient process of transferring graphene layer from a metal substrate to a second substrate with minimal or no damages, and where the metal substrate can be recycled. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a structure which comprises: (a) a metal substrate having protons adsorbed and/or absorbed at a surface, and (b) a graphene layer overlying the metal substrate; and/or (a) a metal substrate, (b) a graphene layer overlying the metal substrate, and (c) a photo acid generator material in contact with the graphene layer.