• 专利标题:   Low-temperature polycrystalline silicon thin film transistor, useful in array substrate of display panel, has active layer, source electrode, drain electrode, gate electrode, gate insulating layer, and oxidized graphene layer.
  • 专利号:   CN105261654-A, WO2017076274-A1, US2017365623-A1, EP3373338-A1, CN105261654-B, US10243004-B2, EP3373338-A4
  • 发明人:   ZHANG S, ZHAN Y, CHAN Y
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD, BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/336, H01L027/12, H01L029/786, H01L021/02, H01L029/423, H01L029/51, H01L029/66, H01L029/49
  • 专利详细信息:   CN105261654-A 20 Jan 2016 H01L-029/786 201642 Pages: 16 English
  • 申请详细信息:   CN105261654-A CN10743470 05 Nov 2015
  • 优先权号:   CN10743470, WOCN104224

▎ 摘  要

NOVELTY - A low-temperature polycrystalline silicon thin film transistor has an active layer arranged on a substrate, a source electrode, a drain electrode, a gate electrode, a gate insulating layer arranged between the active layer and the gate electrode, and an oxidized graphene layer arranged between the active layer and the grid insulating layer. USE - The low-temperature polycrystalline silicon thin film transistor is useful in an array substrate of a display panel (all claimed). ADVANTAGE - The low-temperature polycrystalline silicon thin film transistor has reduced surface roughness and surface defect mode density. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) an array substrate; (2) a display panel; and (3) the method for the manufacture of low-temperature polycrystalline silicon thin film transistor.