• 专利标题:   Formation method of thin film for graphene film of hexagonal boron nitride involves polishing the surface of substrate consists of metal or metallic compound, and forming thin film from monoatomic layer or diatomic layers.
  • 专利号:   JP2013067549-A
  • 发明人:   ODAWARA G, OSHIMA C, HIBINO H
  • 专利权人:   UNIV WASEDA GH, NIPPON TELEGRAPH TELEPHONE CORP
  • 国际专利分类:   C01B031/02, C01B035/08, C23C016/26, C23C016/38
  • 专利详细信息:   JP2013067549-A 18 Apr 2013 C01B-031/02 201329 Pages: 13 Japanese
  • 申请详细信息:   JP2013067549-A JP267885 07 Dec 2011
  • 优先权号:   JP193507

▎ 摘  要

NOVELTY - Thin film is formed by polishing the surface of substrate consists of metal or metallic compound to surface roughness of less than or equal to 5 nm Rmax, and forming thin film as base surface from monoatomic layer or diatomic layers using to-be-polished surface as template. USE - Formation method of thin film for graphene film of hexagonal boron nitride (h-BN) (claimed) used as flexible transistor and transparent electrode. ADVANTAGE - Grain boundaries and defects are reduced, reproducibility is sufficient and stable, excellent in transparency, and flexible. DESCRIPTION OF DRAWING(S) - The drawing shows molecular structured of graphene film (a), and h-BN film (b). (Drawing includes non-English language text).