• 专利标题:   Graphene transistor manufacturing method involves forming drain and gate electrode on insulating layer that is laminated between source and drain regions.
  • 专利号:   KR1169538-B1
  • 发明人:   LEE K J, CHOI I S, CHOI S Y, HONG B H
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY
  • 国际专利分类:   H01L021/027, H01L021/336, H01L029/78
  • 专利详细信息:   KR1169538-B1 27 Jul 2012 H01L-021/027 201256 Pages: 35
  • 申请详细信息:   KR1169538-B1 KR091600 17 Sep 2010
  • 优先权号:   KR091600

▎ 摘  要

NOVELTY - The method involves forming silicon oxide layer in upper portion of substrate (201). A laser beam is irradiated towards substrate under gas atmosphere. An insulating layer (205) is laminated between source and drain regions. Drain and gate electrodes are formed on insulating layer. USE - Graphene transistor manufacturing method. ADVANTAGE - The graphene transistor can be manufactured efficiently at low cost. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating process for manufacturing graphene transistor. Substrate (201) Graphene (202) Semiconductor device (203) Rear area (204) Insulating layer (205)