▎ 摘 要
NOVELTY - The system has a semiconductor driving unit, a touch probe horizontal driving unit, a touch probe vertical driving unit, an electrical detecting unit and a pressure detecting unit. The touch probe horizontal driving unit and the touch probe vertical driving unit are connected in series with each other by a driving signal line. The pressure detection unit is driven by the driving completion signal of the touch probe vertical driving device as a driving start signal. The graphene sensing unit is correspondingly set on the edge of the hole. USE - Graphene sensing unit based semiconductor detecting system. ADVANTAGE - The detecting cost of the semiconductor is reduced. The semiconductor detection reliability of contact pressure is greatly improved. The design complexity is reduced. The sensitivity and accuracy of semiconductor detecting system are improved. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of a graphene sensing unit based semiconductor detecting system. (Drawing includes non-English language text)