• 专利标题:   Graphene sensing unit based semiconductor detecting system has touch probe horizontal driving unit and touch probe vertical driving unit connected in series with each other, and pressure detection unit driven by vertical driving device.
  • 专利号:   CN106206355-A, CN106206355-B
  • 发明人:   LIU Y
  • 专利权人:   CHENGDU HUIZHI YUANJING TECHNOLOGY CO, CHONGQING MIAOGE SEMICONDUCTOR RES INST
  • 国际专利分类:   H01L021/66
  • 专利详细信息:   CN106206355-A 07 Dec 2016 H01L-021/66 201704 Pages: 11 Chinese
  • 申请详细信息:   CN106206355-A CN10777914 30 Aug 2016
  • 优先权号:   CN10777914

▎ 摘  要

NOVELTY - The system has a semiconductor driving unit, a touch probe horizontal driving unit, a touch probe vertical driving unit, an electrical detecting unit and a pressure detecting unit. The touch probe horizontal driving unit and the touch probe vertical driving unit are connected in series with each other by a driving signal line. The pressure detection unit is driven by the driving completion signal of the touch probe vertical driving device as a driving start signal. The graphene sensing unit is correspondingly set on the edge of the hole. USE - Graphene sensing unit based semiconductor detecting system. ADVANTAGE - The detecting cost of the semiconductor is reduced. The semiconductor detection reliability of contact pressure is greatly improved. The design complexity is reduced. The sensitivity and accuracy of semiconductor detecting system are improved. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of a graphene sensing unit based semiconductor detecting system. (Drawing includes non-English language text)