• 专利标题:   Gallium nitride-based substrate, epitaxial graphene direct chemical vapor deposition growth comprises using III-V group compound semiconductor gallium nitride as substrate, pre-processing, and directly growing graphene.
  • 专利号:   CN102903617-A, CN102903617-B
  • 发明人:   CHAI Z, ZHANG J, HAN D, HAO Y, YAN Y, NING J, WANG D
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   C30B025/02, C30B025/18, C30B029/02, H01L021/205
  • 专利详细信息:   CN102903617-A 30 Jan 2013 H01L-021/205 201349 Pages: 7 Chinese
  • 申请详细信息:   CN102903617-A CN10408272 22 Oct 2012
  • 优先权号:   CN10408272

▎ 摘  要

NOVELTY - Gallium nitride (GaN)-based substrate, epitaxial graphene direct chemical vapor deposition (CVD) growth comprises using III-V group compound semiconductor GaN as substrate, pre-processing GaN substrate, controlling growth pressure, flow rate and temperature, directly growing graphene on GaN, and providing material as gallium nitride-graphene device structure. USE - Method of gallium nitride (GaN)-based substrate, epitaxial graphene direct chemical vapor deposition (CVD) growth (claimed). DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the gallium nitride-based substrate, epitaxial graphene direct chemical vapor deposition growth.